Studies of 3D Nano Structures Metal Oxide Tandem Heterojunctions for CO2 Gas Sensing Applications

• Main Authors: Yueh-CheLi, 李岳哲
• Other Authors: Yean-Kuen Fang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/77132896993954506595

碩士 === 國立成功大學 === 微電子工程研究所 === 102 === In this thesis, we developed the tandem heterojunctions with 3D nano structures for CO2 gas sensing applications. The tandem type sensing element effectively increases the sensing ability. For example, in a planar type sensor, under the condition of 150 oC, -3V, and 3000 ppm CO2 ambient, the sensor sensitivity can be promoted from 554% to 796% and 812% , respectively for the 2D structure , Ag connected tandem heterojunction sensing element, and 3D nano rod device but with single heterojunction sensing element. Furthermore, if both of the tandem sensing element and 3D nano-structures are employed, the sensitivity improvement can even increase up to 2187%. Besides, the improvement in the sensitivity also leads the reduction of response time from few minutes of the conventional resistive type to tenths seconds.