Nitrided TiO2 as Charge Trapping Layer for Nonvolatile Memory Devices

碩士 === 國立成功大學 === 材料科學及工程學系 === 102 === Abstract Flash memories using poly-silicon as charge storage layers are the mainstream of conventional nonvolatile memories (NVM). However, flash memories face the difficulty in continued dimension down-scaling because of sidnificant charge losses through the...

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Bibliographic Details
Main Authors: Po-HsienKe, 柯伯賢
Other Authors: Jen-Sue Chen
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/73puet