| Summary: | 碩士 === 國立成功大學 === 工程管理碩士在職專班 === 102 === Demand of TV LCD display panel continues to grow and leads to further investment in next generation (G8.5) LCD panel manufacturing. Vacuum sputtering equipment is critical in G8.5 LCD panel production. Due to panel size difference between generations, there are issues in technique of controlling and stabilizing vacuum process, e.g uniformity, carrier moisture control, residual gas and thin film quality control, etc. Therefore, continuous improvement in technique of the production process control and stabilization is worthwhile for study and research.
In this study, we applied FMEA theory in cases to identify the riskiest production process and prioritized these processes as the top improvement item. Then, we used contradiction matrix of TRIZ theory to define parameters of improvement and deterioration in cases. Afterwards, we applied 40 inventive principles to find a conclusion. The conclusion is application of RGA (residual gas analyzer) for process improvement, and results of improvement in cases were collected to support the hypothesis of this study.
This study provides a practical application of TRIZ theory to vacuum sputtering equipment control in FPD industry. By demonstrating its application to identify RGA as a successful solution for process improvement, we expect to assist engineers to exercise related theory and methods of TRIZ to shorten problem solving process in production. In addition, engineers’ ability of independent problem solving will also improve.
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