| Summary: | 碩士 === 國立勤益科技大學 === 機械工程系 === 102 === The structure configuration of air flotation platform is usually designed with low gravity center, low geometric error, low fever errors and symmetrical structure. Especially, the mobile component is mostly made of lightweight aluminum to reach a low inertia for high precision and high speed motion control. As a consequence, the linear stage with air bearing has been widely used in the fields of optical instruments, precision medical equipment, semiconductors, subtle elements etc. Such a stage also greatly adopted in precision optoelectronic semiconductor process equipment or testing equipment.
This study was aimed to design a high precision aerostatic linear stage based on the newly developed double-layer throttling porous aerostatic bearing, which was created by GMT company collaborated with Metal Industries Research and Development Centre. The mobile platform was made of alumina material with the use of ultra-precision diamond machining. A weight reduction 65% of the mobile stage was achieved due to the use of structural material of alumina alloy, instead of the originally steel material. The straightness accuracy of precision linear aerostatic stage was shown to be 0.7 um, which was based on the high accuracy, good surface roughness and lighter components. The geometric accuracy has been proven to be below 1um/100mm and surface roughness below 0.1um. In addition, the other key feature of this stage is the combination of the aerostatic porous double-throttling technology with the microwell array aluminum board, which effectively enhances the rigidity of the loading capacity due to the array of pore distribution and number density to regulating fluid properties. It follows that rigidity was increased by 3.6 times.
As a whole, the prototype of the newly designed aerostatic linear stage developed in this study has been demonstrated to show a better performance as expected. It is believed that a more complete linear stage can further be developed based on this prototype. The technology regarding the double-layer throttling porous aerostatic bearing can also be widely applied to develop other precision instruments in the field of manufacturing industry.
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