| Summary: | 碩士 === 國立中興大學 === 精密工程學系所 === 102 === A tristable micromechanism with a bistable mechanism embedded in a surroundingbistable mechanism is developed. Three stable equilibrium positions are within therange of the linear motion of the mechanism. The tristability of the mechanismoriginates from the different actuation loads of the two bistable mechanisms.Thecharacteristics of the mechanism are verified by experiments. The force versusdisplacement curve of the mechanism exhibits the tristable behavior within adisplacement range of 230 μm .
With the advancement of miniaturization, many micromechanisms are fabricatedby Microelectromechanical System (MEMS) processes. Most characterization methodsof micromechanisms rely on optical or tactile techniques. Due to increasing complexityand decreasing size of microsystems, it becomes more challenging to measure theforce-displacement characteristics of micromechanisms. Therefore, a device of in-planeforce measurement of micromechanisms is developed, which is equipped withtranslation stages and a miniature load cell. Force-displacement characterization of aconstant-force tristable micromechanism using the developed device is demonstrated.
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