Optimization of the etching parameters for photo alignment using experimental design
碩士 === 國立中興大學 === 機械工程學系所 === 102 === Semiconductor manufacturing process can be divided into five processes: filming, lithography, etching, diffusion, and chemical mechanical polishing. In this rapid technology changing era, a semiconductor device must accommodate more effective circuits in a space...
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| Format: | Others |
| Language: | zh-TW |
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2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27661689516641187052 |