Development of PDMS nano pillar array during the cast molding process using nanoporous anodized aluminum oxide(AAO) mold

• Main Author: 董家豪
• Other Authors: Chia-Che Wu
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/69859461810458846125

碩士 === 國立中興大學 === 機械工程學系所 === 102 === This study developed PDMS nano pillar array during the cast molding process by nanoporous anodized aluminum oxide (AAO) mold. The self-assembly structure of anodic aluminum oxide (AAO) has been investigated for two-step anodization of 99.9995% aluminum in 8wt% phosphoric acid solution. Before anodization, the sheet was electropolished at room temperature in a mixture solution of perchloric acid and ethanol (1:4, v/v) to reduce the roughness of the aluminum sheet surface. Phosphoric acid was used for first-step anodizations from 120 to 170V at rate of 0.1V/s. Anodization was conducted with vigorous magnetic stirring in a low constant temperature water baths at 0°C. The first-step AAO was immersed into a combination solution of 3.5wt% phosphoric acid and 2wt% chromic acid to remove the residual aluminum oxide. The morphology of the first-step AAO was investigated by a field-emission scanning electron microscope and was seen the hexagonal honeycomb structure on the aluminum substrate. Second-step anodic oxidation process was performed in phosphoric acid at 140V. The thickness of the oxide layer was controlled by anodization time and the nano holes have a depth about 200nm for 6min. Finally, 0.43M phosphoric acid was used to expand diameter to achieve around 200nm and nanoporous anodized aluminum oxide (AAO) mold was fabricated.