Synthesis of barium titanate films on TiN/Si substratesby atmospheric pressure plasma jet
碩士 === 國立中興大學 === 材料科學與工程學系所 === 102 === The aim of this work is to synthesize cubic barium titanate films on TiN-coated Si substrate by atmospheric pressure plasma jet (APPJ) using 0.025 M - 0.3 M Ba(NO3)2 with 0.05 M and 0.1 M Ti(NO3)4 as precursors. TiN films, acted as the buffer layer to make a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85827251477791385932 |