The Investigation of Electrical and Optical Properties of Al-doped ZnO Thin Films by Reactive Pulse-DC Magnetron Sputtering In C2H2 Reactive Gas
碩士 === 國立中興大學 === 材料科學與工程學系所 === 102 === In this study, the Al-doped ZnO transparent conductive thin film was deposited on glasses by reactive pulse-DC magnetron sputtering. The substrate was heated up to a high temperature range between 230 to 250 degrees during the sputtering process. During th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07386417229276649030 |