MoC intermediate layer for FePt magnetic recording media

• Main Authors: Qi-Shao Luo, 羅琦邵
• Other Authors: Jai-Lin Tsai
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/20767798464173510543

碩士 === 國立中興大學 === 材料科學與工程學系所 === 102 === A (001) textured FePt film was deposited on MoC/CrRu/glass at heated-substrate by using magnetron sputtering in 4-guns sputter system with DC power supply. We studied the effect of MoC conductive intermediate layer on CrRuFePt system. My work would step by step with three parts. In the first part, the FePt films were deposited on different MoC thickness at 380℃. And the MoC intermediate layer was used to resist the Cr diffusion up to high deposition temperatures and promotes the epitaxial growth of the (001) texture FePt films. The FePt showed high perpendicular magnetization and the out-of-plane coercivity increased with MoC thickness. The FePt/MoC (5 nm)/CrRu film showed a square out-of-plane magnetic hysteresis loop with a coercivity of 6.0 kOe and a linear-like in-plane loop. We also learned that the FePt particles would concentrate in the rectangular structure by specific orientation at certain temperature. The second part was fixed the FePt (10 nm)/MoC (5 nm)/CrRu film thickness and changed the deposited temperature of FePt films from 260℃ to 410℃. We can obviously observe that the FePt started to order at 320℃ and the ordering degree reach to 0.79 when the FePt deposited at 410℃, also the square magnetization curve showed and the greater out-of-plane Hc value of 6.9 kOe was obtained. In addition, the rectangular structure which shows at 380℃ was surmised to be a transition-shape. Once the deposition temperature slightly increased, the rectangular area would be dispersing into particular-like. In the final part, the substrate temperature of FePt (t)/MoC (5 nm)/CrRu film was fixed and the FePt thickness t changed from 4~10 nm. At such high deposited temperature of 410℃ could obtain a great magnetic property on all of samples on this part. The highest coercivity value was 8.3 kOe when FePt thickness was 5 nm. We found that the magnetic property of FePt/MoC/CrRu films might be more related to ordering degree rather than microstructur. A multi-fuctional MoC intermediate layer exhibited heteroepitaxial relation with FePt and CrRu and was capable of resisting the underlayer diffusion at high deposition temperature.