Grating-diffraction position sensing devices
碩士 === 龍華科技大學 === 機械工程系碩士班 === 102 === In this paper, position sensing devices by using grating plates which are consistant of two-dimensional (2-D) grating dots are used to find accurate incident positions of laser beams according to the arc distributions of bright spots diffracted by the grati...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/87852842660985303778 |