The Opt-Electric properties of Ti:GZO thin film on flexible substrate under different annealing temperatures and deposited process
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === This study utilizes DC magnetron sputtering to deposit GZO transparent conductive films and Ti thin films on the same PI(polyimide) flexible substrates, then treats GZO/Ti thin films to conduct different anneal temperatures and times with rapid thermal an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69632640000549011082 |