S parameter measurements of coplanar waveguides with various thicknesses of SiO2

碩士 === 義守大學 === 電機工程學系 === 102 === In this study, the SiO2 thin films with different thickness (3μm, 5.303μm and 10.52μm) were deposited onto p-type Si substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) method. The coplanar waveguide was fabricated on composite substrate. The S parameter...

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Bibliographic Details
Main Authors:	Pei-Hsuan Hsieh, 謝佩璇
Other Authors:	Ruyen Ro
Format:	Others
Language:	zh-TW
Published:	2014
Online Access:	http://ndltd.ncl.edu.tw/handle/26240513943279098674

id	ndltd-TW-102ISU05442025
record_format	oai_dc
spelling	ndltd-TW-102ISU054420252015-10-14T00:23:51Z http://ndltd.ncl.edu.tw/handle/26240513943279098674 S parameter measurements of coplanar waveguides with various thicknesses of SiO2 不同厚度二氧化矽薄膜之共平面波導的S參數量測 Pei-Hsuan Hsieh 謝佩璇碩士義守大學電機工程學系 102 In this study, the SiO2 thin films with different thickness (3μm, 5.303μm and 10.52μm) were deposited onto p-type Si substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) method. The coplanar waveguide was fabricated on composite substrate. The S parameters were measured using on wafer Short-Open-Load-Thru (SOLT) calibration and high frequency probe. The characteristics between thin films and transmission line were analysis. Ruyen Ro 羅如燕 2014 學位論文 ; thesis 53 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 義守大學 === 電機工程學系 === 102 === In this study, the SiO2 thin films with different thickness (3μm, 5.303μm and 10.52μm) were deposited onto p-type Si substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) method. The coplanar waveguide was fabricated on composite substrate. The S parameters were measured using on wafer Short-Open-Load-Thru (SOLT) calibration and high frequency probe. The characteristics between thin films and transmission line were analysis.
author2	Ruyen Ro
author_facet	Ruyen Ro Pei-Hsuan Hsieh 謝佩璇
author	Pei-Hsuan Hsieh 謝佩璇
spellingShingle	Pei-Hsuan Hsieh 謝佩璇 S parameter measurements of coplanar waveguides with various thicknesses of SiO2
author_sort	Pei-Hsuan Hsieh
title	S parameter measurements of coplanar waveguides with various thicknesses of SiO2
title_short	S parameter measurements of coplanar waveguides with various thicknesses of SiO2
title_full	S parameter measurements of coplanar waveguides with various thicknesses of SiO2
title_fullStr	S parameter measurements of coplanar waveguides with various thicknesses of SiO2
title_full_unstemmed	S parameter measurements of coplanar waveguides with various thicknesses of SiO2
title_sort	s parameter measurements of coplanar waveguides with various thicknesses of sio2
publishDate	2014
url	http://ndltd.ncl.edu.tw/handle/26240513943279098674
work_keys_str_mv	AT peihsuanhsieh sparametermeasurementsofcoplanarwaveguideswithvariousthicknessesofsio2 AT xièpèixuán sparametermeasurementsofcoplanarwaveguideswithvariousthicknessesofsio2 AT peihsuanhsieh bùtónghòudùèryǎnghuàxìbáomózhīgòngpíngmiànbōdǎodescānshùliàngcè AT xièpèixuán bùtónghòudùèryǎnghuàxìbáomózhīgòngpíngmiànbōdǎodescānshùliàngcè
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S parameter measurements of coplanar waveguides with various thicknesses of SiO2

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