| Summary: | 碩士 === 義守大學 === 化學工程學系暨生物技術與化學工程研究所 === 102 === In this study, a simple fabrication of zeolite nanocomposite thin films,
deposited by vaporizing a mixing Silicalite-1 and PAA suspension to a set ratio,
were prepared by our self-designed liquid spray system. Investigated the effects
of the operating parameters such as the heating temperature on substrate, the rates
of the main air, auxiliary air flow and deposition time, could prepared the good
quality nanocomposite films. The crystalline, surface morphology, and chemical
composition of prepared samples would performed by the instruments of XRD,
FT-IR, BET, TGA, SEM, TEM ,AFM and Constant Angle Meter.
The result showed that zeolite nanocomposite thin films deposited by our
system is success and also remove the template agents simultaneously .Compared
with spin-coating method ,need to remove the template agents under
high-temperature calcinations and therefore difficult to avoid the film cracks.
Many researches hoped to develop Silicalite-1 membrane as low-k materials
as it has good mechanical strength and high porosity more than traditional silicon
material. However, the adhesion and hydrophobicity far worse compared of
colloids such as macromolecules, the problem mentioned have to effectively
solved in order to the commercialize stage. Based on the above fabricating, our
zeolite thin films having higher adhesion and hydrophobicity and good flatness,
also owned a low dielectric constant (k= 2.17), it shows more potential
commerical development is to be expected.
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