Fabrication and Characterization of ZnO Thin Film P-N Junction Devices
碩士 === 大葉大學 === 電機工程學系 === 102 === In this study, the ZnO p-n junctions were fabricated on Si (0 0 1) substrates by the rf magnetron sputtering system to investigate the electrical and optical properties. In the first phase, ZnO thin films were fabricated on Si (0 0 1) substrates with various nitrog...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83190873552438664225 |