| Summary: | 碩士 === 中華大學 === 科技管理學系碩士班 === 102 === Mask aligner, a complicated equipment designed for Au bumps, requires a high level of technical ability for its maintenance, and is extremely expensive. Mask aligner’s maintenance costs constitute a large portion of a corporation’s expenditures. In the event mask aligner breaks down, many products have to be redone, production process slows down, and production costs such as manpower and materials increase dramatically, impacting the profits severely. The defected equipment has to be overhauled, causing operation costs to increase by tens of millions dollars. To a worse extent, the delayed shipment deteriorates customer satisfaction and damages the corporation’s competitive edge. An effective solution is therefore extremely important. Usually, engineers rely on the experience passed down by their predecessors to solve the issues related to process techniques. To solve a straightforward problem, empirical law is sufficient. When a complicated problem occurs, engineers are unable to identify the cause of problem simply by trial and error, and lack the proper tools to find a solution. In this connection, engineers are likely to obtain an effective solution through the highly structured TRIZ thinking model. Therefore, this study intended to identify the optimal factors for equipment improvement through TRIZ systemized inductive analysis procedure, and to find the theoretical basis of the solution using 39 engineering parameters, contradiction matrix, physical contradiction, segregation principle, and inventive principle of TRIZ technical contradiction, thereby allowing engineers to find the most effective solutions. This study began with theoretical research, followed by analysis and practice verification, and focused on the inventive principle of the solutions using TRIZ techniques and physical contradiction. Thus, when mask aligner’s thermal effect becomes a problem, engineers can slice objects into components using mobility principle, allowing the object’s characteristics and external environment to act perfectly and therefore solutions are acquired. To solve the problems arising from optical contamination, engineers can obtain solutions from color-changing principle. When color changes and becomes harmful, engineers can use partition principle to transform the system into assembled objects and provide assembled components for improvement. In addition, engineers can use partition principle to remove or isolate the retarded attributes. The methods provided by TRIZ are sufficient to improve the problems arising from the poor visualization caused by mask aligner. Apparently, engineers can draw inspirations from the logics provided by TRIZ. Therefore, engineers can expect the outcomes after the problems are solved, can visualize the whole picture of the problems, and acquire the optimal solutions. There is no doubt that TRIZ provides a clear direction that leads engineers to the proper solutions. The research results are hereby presented to the corporation and serve as a reference for the equipment engineers, allowing them to find proper solutions through TRIZ in a later stage.
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