Study of the properties of NaCl concentration Sensor with single of plurality Poly-Si Nanowire

• Main Authors: Yao-Yuan HO, 何耀元
• Other Authors: Cheng-Chin Hsu
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/05032055549163024348

碩士 === 元智大學 === 光電工程學系 === 101 === In this study, we have fabricated polycrystalline silicon nanowire with the top-down method. To demonstrate the performance of this sensor, different concentration of sodium chloride were prepared in different pH values and measured by the proposed sensor of different geometrical size of the polycrystalline silicon nanowire. In addition, we have developed a real-time data gathered program with LabVIEW software. According to the results, the critical parameters of the geometrical size of the nanowire of the sensor can be obtained which were the width of 0.3 μm, the length of 3 μm, and parallel connection of five nanowires. The concentration of the sodium chloride can be measured within the range from 10-1 M to 10-6 M. The smallest concentration of the sodium chloride is about 0.05845 ppm. Furthermore, the sensor can be reused more than 60 times while preserve acceptable performance. Based on these results, we believe that the propsed sensors have good reproducibility, good reliability, and high sensitivity.