Low pressure plasma voltage process for transformer couplingplasma etching
碩士 === 元智大學 === 機械工程學系 === 101 === Plasma is used to application with wide range which used the structure of transformer coupling plasma to generate and keep the plasma stability. This study applied Paschen’s Law to analyze breakdown voltage when argon gas is used to control pressure in a process ch...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/42065818698130696777 |