Research on Multi-wavelength Differential Confocal Surface Profilometry
博士 === 國立臺北科技大學 === 機電科技研究所 === 101 === This study presents a novel Multi-wavelength Differential Confocal surface profilometer using broadband light source, dispersion chromatic objective and two color line CCD devices. Optical confocal microscopy for surface profilometry has become extremely impor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52nj68 |