Design and Control of an Optical Alignment System Using a XXY Stage Integrated with Two CCD

• Main Authors: YuChungLi, 李育承
• Other Authors: 林志哲
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/vdenzt

碩士 === 國立臺北科技大學 === 自動化科技研究所 === 101 === In this study, an automatic optical inspection (AOI) system is integrated with a XXY moving stage to replace manual operations to achieve automatic assembling tasks. The AOI-based XXY stage system consists of an automatic vision system, a XXY three-axis positioning stage and a computer with a DSP motion card. The integrated vision servo system has two GIGAE CCDs with lens and the DSP motion card is used to make the XXY three-axis positioning stage perform positioning tasks based on a vision servo system. The vision servo system is developed to provide the position information according to the image recognition of the cross-marks and the DSP motion card is used to produce the positioning command for the XXY stage. To obtain the better precision, a neural network based compensation is proposed to correct the shift positioning error due to the rotation movement.