| Summary: | 碩士 === 國立臺北科技大學 === 光電工程系研究所 === 101 === This research proposes a polarized Newton scanning interferometer capable of examining plane optical surfaces. The characteristics of Newton interferometer are common-path design, equivalent optical-path-length, so they have performance of anti-vibration and they are able to use low coherent light sources. Since it incorporates the technique of optical coherent tomography with the conventional Newton interferometer, it is not only with higher measurement resolution but also with the capability of step-height measurements. The measurement theory is first demonstrated; a setup, which consists of a light source module, the optical path difference scanning module, the proposed interferometer, and a control and image processing system, constructed to realize the proposed interferometer is then described; and the experiments and experimental results are finally presented.
|
|---|
