Fabrication and Characterizations of Silicon Nanocone Solar Cell

• Main Authors: Yi-Song Li, 李奕松
• Other Authors: Hsi-Lien Hsiao
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/46344969791932758414

碩士 === 東海大學 === 物理學系 === 101 === Nanorod arrays possess the good light absorption properties and antireflection effect, and a tapered geometry with high mechanical strength and stability, compared to the cylindrical geometry with better light absorption efficiency. These characteristic is help for fabricated nanorod solar cell and to improve the efficiency. In this study, tapered- single crystalline silicon nanorods is synthesis by on metal substrate by low-pressure chemical vapor deposition systems and Au/Ga/Au catalyst. The p type silicon nanorod synthesis by SiH4, H2, Ar gas and doped with Ga catalyst. The p-n structure silicon nanorod synthesis is similarity with p type synthesis process, the different is after p type silicon nanorod synthesis end , we don’t stop fabricate process and added the doped gas PH3 for fabricate n layer. In Current-Voltage (I-V) Curves results, it appeared the diode property, although current is increased but haven’t produce the photo-current, in TEM analysis, found that have an oxide layer coated on nanorod surface which the thickness is 2nm, we inference that the oxide layer obstruct carrier transport. For solve this problem, we coat a heavy doped n layer on nanoroad surface to avoid the oxide layer effect and as the upper electrode. However, this problem can’t be solved. Future,we will use CVD and ALD In the same cavity ,for synthesis silicon nanorod and solve the oxidation problem.