Apply TiO2 Nanostructures to Surface Acoustic Wave Ultraviolet Photodtectors

• Main Authors: Chi-Wei Wen, 溫騏維
• Other Authors: 水瑞鐏
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/hqq6kr

碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 101 === 　　In this paper, by using RF magnetron sputter system prepared titanium dioxide thin films. In order to obtain high quality of titanium dioxide films, sputtering process by adjusting the gas ratio, the sputtering pressure and the annealing temperature of the thin films. Using hydrothermal method prepared titanium dioxide nanorods for the sake of synthesizing to increase the light absorption capacity of titanium dioxide nanorods by adjusting different pH solution and growth time matching. The ultraviolet detector combines the surface acoustic wave devices with the high quality titanium dioxide thin film and high light absorption capacity of titanium dioxide nanorods 　　In the material analyze, the crystalline structure, surface morphology and luminescent characteristics of titanium dioxide thin films were examined by X-ray diffraction, scanning electron microscopy, and photoluminescence spectrometer. 　　In the detector analyze, the insertion loss and phase, resistor and capacitor were analyzed by Network Analyzer and LCR Meter