Sensitivity-Enhanced SERS Substrate Fabrication by Nanoimprinting Compressed PDMS Elastomer

• Main Authors: Jia-Nan Yan, 顏嘉男
• Other Authors: 郭文凱
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/56rd3h

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 101 === This paper mainly explores the components for enhancing the Raman scattering effect. It attempts to reprint grating through Soft Lithography matching with the UV-based Nanoimprint Lithography (UV-NIL) technology, indirectly changing the grating period via the extruding die core to reprint the grating structure on a glass substrate, and finally make a layer of Au plated on the grating structure by thermal evaporation to finish the surface-enhancing Raman spectrum component. In order to learn the component shape, period and modulation depth, we use an Atomic Force Microscope (AFM) to observe the surface topography of the component; in measuring Raman signals, the Raman dedicated spectrometer Maya 2000pro produced in Ocean Opticse matching with an excitation light source with wavelength of 785 nm is adopted. Besides, it assists on the discussion on the electric field based on different periods, metal thicknesses, modulation depths and shapes through the commercially available simulation software EM Explorer, so as to find the best parameter to achieve optimal enhancement effect. In the experiment process, it makes the enhancing Raman spectrum component respectively with the grating shapes of 555nm and 832 nm, and produces grating structures with four different periods of 5 ％、10 ％、15 ％、20 ％（673 nm,703 nm,751 nm and 791 nm） by extruding style. The six enhancing Raman spectrum components are used to measure 0.1 M of benzoic acid solution to compare the Raman spectral intensity, which is then compared with the trends in the electric field. The results show that the electric fields of the enhancing component are conducive to enhancing Raman signals. Finally, the measurement results are compared with those of the commercially available enhancing Raman spectrum components, concluding that the former is better than the latter for more than 5 times.