| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 101 === In this study, the blue ray LED grains are used to conduct the ITO patterning and coarsening process, and the effect of it on the light extraction amount. First, the three reticles with different patterns are respectively used to (1) define the work area, (2) pattern etching, and (3) produce electrode in the three yellow ray processes. Secondly, the LED chips are conducted with the process of the yellow-ray, etching, thin film, alloy, and deposition, in which the thickness of the Indium Tin Oxide ITO is controlled into 120nm and 260nm to conduct the wet etching open-hole process to analyze the effect of patterning on light output. In the coarsening process, the ITO etching solution is controlled at 40℃and the interval of the coarsening time is every 5 seconds for total 25 seconds, so as to analyze the light extraction change relationship after un-coarsening and coarsening.
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