Fabrication and electrical properties of highly textured In2O3(111) films
碩士 === 國立高雄大學 === 應用物理學系碩士班 === 101 === In this study, In2O3 thin films were grown on the glass, Al2O3(0001), Al2O3(11-20) substrates by thermal deposition. There were three different deposition procedures for the growth of In2O3 thin films. The first procedure was a thermal oxidation of In(101) fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15496475377376228131 |