Study the fabrication of self-assembled monolayers (SAMs) on transparent substrates and the deposition of aluminum doped zinc oxide (AZO) thin films on top of the SAMs modified substrates

• Main Authors: TIEN THIEU, 武氏進韶
• Other Authors: Yian Tai
• Format: Others
• Language: en_US
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/57998949752338398930

博士 === 國立臺灣科技大學 === 化學工程系 === 101 === A facile, robust and effective method was used to fabricate organosilane self assembled monolayers (SAMs) on transparent substrates. Specifically, polyethylene terephthalate (PET) substrate surfaces could be chemically modified while avoiding chemical degradation. The results shown that UV – Ozone pretreatment for PET (uv-PET) substrate surfaces used favours a more densed packing of silane molecules in the self assembled processes due to generating a large surface concentration of hydrophilic moieties by UV irradiation. Various substrate surfaces having different functional groups, wettability, and the surface tension were developed by coating organosilane SAMs on PET and glass substrates. Aluminium doped zinc oxide (AZO) were deposited on transparent substrates via RF magnetron sputtering at room temperature. The sputtering parameters such as working distance and working pressure were varied from 3 to 7 cm and from 2.0 x 10-3 to 8.0 x 10-3 Torr, respectively. The effects of electron-donating/withdrawing properties of SAM functional groups on property of AZO films have been studied. The resistivity of AZO films deposited on uv-PET was decreased from 2.29 x 10-3 to 1.12 x 10-3 Ωcm by applying SAM modification at optimized conditions of 20W, 6 cm and 5.0 x 10-3 Torr. High optical transmittance of AZO films was also achieved at around 85% in visible wavelength region. The properties of SAMs on transparent substrate and the structural, electrical and optical properties of AZO films were characterized by contact angle (CA), X-ray photoelectron spectroscopy (XPS), Atomic force microscopy (AFM), X-ray Diffraction (XRD), Field-Emission Scanning electron microscope (FE-SEM), Hall measurement and Ultraviolet–visible spectroscopy (UV-Vis).