Design and Fabrication of Micro Piezoelectric and Electrostatic Energy Harvester Based on Stainless Steel Substrates

• Main Authors: Jyun-Yan Zeng, 曾俊諺
• Other Authors: Wen-Jong Wu
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/20329971803250668906

碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 101 === In this thesis, three types energy harvesters have been developed, including two-dimensional micro piezoelectric energy harvester, large size electret energy harvester and micro electret energy harvester. To enable these three types energy harvesters to be operated under high acceleration, the stainless steel substrates are used. The two-dimensional (2D) micro piezoelectric energy harvester is designed in d31 mode, using PZT material as the piezoelectric layer. The experimental results show that the 2D micro piezoelectric energy harvester is able to provide the output power of 3 uW under the resonance frequency of 190 Hz and the excitation level of 2 g acceleration. Both of the large size electret energy harvester and micro electret energy harvester are combined with top and bottom parts. The top structure is composed of two stainless steel springs supporting the middle collecting stripped electrode on both sides. The bottom structure is composed of a Parylene C electret layer, topped with the ground stripped electrode. Together the bottom structure is stacked on the silicon substrate. The experimental results show that the large size electret energy harvester is able to provide the output power of 44 uW under the resonance frequency of 93 Hz and the excitation level of 1.5 g acceleration. On the other hand, the experimental results show that the micro electret energy harvester is able to provide the output power of 5 uW under the resonance frequency of 109 Hz and the excitation level of 2.5 g acceleration.