Oxide Semiconductor Light Emitting Diode Fabrication by the Atomic Layer Deposition Method

碩士 === 國立臺灣大學 === 光電工程學研究所 === 101 === In this thesis, we present the fabrication and characterization of ZnO/GaN and ZnO/Si light-emitting diode (LED) using self-assembled nanosphere lithography and atomic layer deposition (ALD). First, we discuss the theory and process of self-assemble nanosphere...

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Bibliographic Details
Main Authors: Yao-Te Wang, 王耀德
Other Authors: Lung-Han Peng
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/17898722594722438450