Oxide Semiconductor Light Emitting Diode Fabrication by the Atomic Layer Deposition Method
碩士 === 國立臺灣大學 === 光電工程學研究所 === 101 === In this thesis, we present the fabrication and characterization of ZnO/GaN and ZnO/Si light-emitting diode (LED) using self-assembled nanosphere lithography and atomic layer deposition (ALD). First, we discuss the theory and process of self-assemble nanosphere...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/17898722594722438450 |