Ultra-Pure Air (UPA) System Research for Nano-Processing Environments
博士 === 國立臺灣大學 === 土木工程學研究所 === 101 === As semiconductor processes advance into the nano-technology era, Airborne Molecular Contamination (AMC) has become a major problem in nano-technology development and manufacturing facilities. To deal with this problem, a prototype Ultra-Pure Air (UPA) system wi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07147424098297745300 |