The study of infrared detector array with infrared absorber
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 101 === This thesis is using MEMS for manufacturing infrared detector of micro-bridge array. The purpose of micro-bridge structure is decreasing thermal conductance of sensor and building optical resonance cavity to enhance absorption of infrared radiation which we are...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
|
Online Access: | http://ndltd.ncl.edu.tw/handle/01197557005177694190 |