The study of infrared detector array with infrared absorber

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 101 === This thesis is using MEMS for manufacturing infrared detector of micro-bridge array. The purpose of micro-bridge structure is decreasing thermal conductance of sensor and building optical resonance cavity to enhance absorption of infrared radiation which we are...

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Bibliographic Details
Main Author: 黃泓舜
Other Authors: Chun-Chen Chang
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/01197557005177694190