A study of High Sensitivity 128×128 Pixels Infrared Detectors Based On (Pb,Ca)TiO3 Pyroelectric Thin Films
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 101 === In this paper, MEMS process technology is used to prepare integrated 128×128 pixels infrared detector. The detector architecture associates pyroelectric thin film and metal oxide semiconductor field effect transistor. Meanwhile, at the oxide layer of gate, doub...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a27d52 |