Investigation of High-Performance Metal-Insulator-Metal Capacitor Using ZrTiOx/ZrLaOx Stacked Dielectrics
碩士 === 國立清華大學 === 工程與系統科學系 === 101 === Metal-insulator-metal (MIM) capacitors with ZrLaOx/ZrTiOx/ZrLaOx laminate as the insulator were explored in this work. Single ZrTiOx dielectric was found to have a negative quadratic voltage coefficient of capacitance (VCC-α) with a high-κ value of 22.5. By int...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42268969369234923557 |