Fabrication of Silicon Thin Films and SPA Solar Cell by ICP-CVD with Internal Low-Inductance Antenna
碩士 === 國立清華大學 === 電子工程研究所 === 101 === In this thesis, device quality amorphous silicon and polycrystalline silicon thin films were investigated for fabricating SPA solar cells by using ICP-CVD with internal low-inductance antenna (LIA). For polycrystalline silicon thin films, we observed that 98% of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34803974509718275166 |