Study on Template Matching of Microscopic Image at Wafer Level
碩士 === 國立清華大學 === 動力機械工程學系 === 101 === The research is focused on the topic of template matching with microscopic image at wafer level by image processing methods. Due to the occurrence of defect in the wafer, the template and the sample wafer-level microscopic image might be different. Among existi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12454159294593751462 |