Three-dimensional topography measurement for transparent object with specific profile by Phase shifting Differential Interference Contrast Microscopy (PS-DIC)

• Main Authors: Hsu, Yi-Ching, 徐意晴
• Other Authors: 林士傑
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/67205709593505815603

碩士 === 國立清華大學 === 動力機械工程學系 === 101 === Due to the fact that opto-electronic products have become more and more popular in recent years, the demand for displays used in computer monitors, mobile phones, PDAs, digital cameras and tablet PCs has continued to increase significantly. General methods of measurement are not particularly suitable for these objects, which are often transparent and small. The previous study has shown that PS-DIC (phase shifting differential interference contrast interferometer) can be used to measure the profile of transparent specimen with inclined surfaces. However, to apply this technology within the actual production, we must consider more complex geometry measurements with quantitative DIC techniques. In this study, we aim to verify the feasibility of measuring specimens with different profiles, such as trapezoid objects with inclined surfaces and elliptic specimens. Software simulation system was first used to analyze the cause of reconstruction errors, and a method to amend such errors is consequently applied. Next, we set a transmitted PS-DIC measurement system to verify the simulation. The result can provide useful information to improve the accuracy of PS-DIC.