Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process

碩士 === 國立清華大學 === 材料科學工程學系 === 101 === 因申請專利緣故，資料延後公開

Bibliographic Details
Main Authors:	Chiu, Ru-Chien, 邱如謙
Other Authors:	Lee, Chi-Young
Format:	Others
Language:	zh-TW
Published:	2013
Online Access:	http://ndltd.ncl.edu.tw/handle/68145774963819744900

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spelling	ndltd-TW-101NTHU51590832017-08-02T04:22:23Z http://ndltd.ncl.edu.tw/handle/68145774963819744900 Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process 以微波電漿化學氣相沉積低溫成長碳化矽 Chiu, Ru-Chien 邱如謙碩士國立清華大學材料科學工程學系 101 因申請專利緣故，資料延後公開 Lee, Chi-Young 李紫原 2013 學位論文 ; thesis 109 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學工程學系 === 101 === 因申請專利緣故，資料延後公開
author2	Lee, Chi-Young
author_facet	Lee, Chi-Young Chiu, Ru-Chien 邱如謙
author	Chiu, Ru-Chien 邱如謙
spellingShingle	Chiu, Ru-Chien 邱如謙 Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
author_sort	Chiu, Ru-Chien
title	Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
title_short	Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
title_full	Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
title_fullStr	Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
title_full_unstemmed	Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process
title_sort	low temperature growth of silicon carbide by microwave plasma cvd process
publishDate	2013
url	http://ndltd.ncl.edu.tw/handle/68145774963819744900
work_keys_str_mv	AT chiuruchien lowtemperaturegrowthofsiliconcarbidebymicrowaveplasmacvdprocess AT qiūrúqiān lowtemperaturegrowthofsiliconcarbidebymicrowaveplasmacvdprocess AT chiuruchien yǐwēibōdiànjiānghuàxuéqìxiāngchénjīdīwēnchéngzhǎngtànhuàxì AT qiūrúqiān yǐwēibōdiànjiānghuàxuéqìxiāngchénjīdīwēnchéngzhǎngtànhuàxì
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Low Temperature Growth of Silicon Carbide by Microwave Plasma CVD Process

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