Study of Vertical MOSFET with Embedded Oxide

碩士 === 國立中山大學 === 電機工程學系研究所 === 101 === In this thesis, we propose a junction vertical MOSFET with embedded oxide (EO JVFET) and an junctionless vertical MOSFET with embedded oxide (EO JLVFET). We find out that the EO can improve the series resistances and drive current compared with vertical SOI de...

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Bibliographic Details
Main Authors: Shu-huan Syu, 許書桓
Other Authors: Jyi-Tsong Lin
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/23781086895418462222