A study of High Entropy Alloy Applied on the Thin Film Resistors
碩士 === 國立屏東科技大學 === 機械工程系所 === 101 === The objective of this experiment is to make a series study of the Ni-Cr-Si-Al-Ta, Ni-Cr-Si-Al-W and Ni-Cr-Si-Al-Ti thin films which are fabricated by DC co-sputtering with rotation targets. In order to obtain different film compositions, there are some paramete...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13835843906764088269 |