Design and Fabrication of Micro VOCS gas sensors
碩士 === 國立屏東科技大學 === 材料工程研究所 === 101 === In the current study, MEMS ( Micro-Electro-Mechanical Systems ) technologies are used to fabricate micro VOCs gas sensors, which structure contains thin film sensing layer and platinum sensing electrode on Al2O3 substrates. The make E-beam is used to make plat...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38843215270551479974 |