Investigation on the Optimized Design of Alternate-Hole-Defect for 2-D Phononic Crystal Based Silicon Microresonators
碩士 === 國立彰化師範大學 === 光電科技研究所 === 101 === This paper shows the design, fabrication and characterization of the Bloch-mode micromechanical resonators made by creating alternate defects to form a resonant cavity on a two-dimensional （2-D） silicon phononic crystal （PnC） slab of square lattice. The length...
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| Format: | Others |
| Language: | zh-TW |
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2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12484330424742730407 |