Investigation on the Optimized Design of Alternate-Hole-Defect for 2-D Phononic Crystal Based Silicon Microresonators
碩士 === 國立彰化師範大學 === 光電科技研究所 === 101 === This paper shows the design, fabrication and characterization of the Bloch-mode micromechanical resonators made by creating alternate defects to form a resonant cavity on a two-dimensional (2-D) silicon phononic crystal (PnC) slab of square lattice. The length...
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Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/12484330424742730407 |