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碩士 === 國立中央大學 === 光電科學與工程學系 === 101 === Experiments of this paper is the use of electron cyclotron resonance chemical vapor deposition system (ECRCVD) for microcrystalline silicon thin film growth to explore its film properties and application in pin-type thin-film solar cell intrinsic active layer....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31111940819505825532 |