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碩士 === 國立中央大學 === 機械工程學系 === 101 === In this thesis, MEMS (Microelectromechanical Systems) device was designed and fabricated. Sol-gel PZT was spun on the micro cantilever by using various baking and annealing conditions. The thin film quality was optimized by using XRD, ferroelectric analyzer, and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43500609706689998569 |