| Summary: | 碩士 === 國立中央大學 === 機械工程學系 === 101 === In this thesis, MEMS (Microelectromechanical Systems) device was designed and fabricated. Sol-gel PZT was spun on the micro cantilever by using various baking and annealing conditions. The thin film quality was optimized by using XRD, ferroelectric analyzer, and optical microscope. Since thin film of larger area tends to have cracks and cause short circuit problem, device of small area was used to improve the performance of MEMS device.
The following steps were taken to examine the quality of the films. First, optical microscope was used to distinguish the quality of the films. Among all, sample No. 1 and No. 2 have better performance. Sample No.1 was prepared with drying and pre-baking at 150 °C for 5 minutes and 250 °C for 10 minutes, rapid annealing at 600 °C for 1 minute, and furnace annealing at 350 °C for 10 minutes and 600 °C for 12 minutes. Sample No.2, has the same parameter as sample No.1., except that the rapid annealing temperature and the furnace annealing temperature were 650 °C. Second, the X-ray diffraction was used to find out the crystal orientation. Finally, the remanent polarization of each sample was measured with the ferroelectric analyzer. The results indicated that the characterizations of sample No. 1and 2 were relatively better than those of the others.
The size of the micro-cantilever was chosen to be 1000x2000 μm2. To measure the resonance frequency of the micro-cantilever, the laser displacement meter(KeyenceLK-H150) was utilized.
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