Control of the crystallinity of carbon films grown with pulsed laser deposition by using another laser pulse for synchronous laser processing

• Main Authors: Juang-Han Chiue, 闕壯翰
• Other Authors: Szu-yuan Chen
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/71299925100985401167

碩士 === 國立中央大學 === 物理學系 === 101 === Pulsed laser deposition(PLD) is a simple and eazily-lm-growing technology. With a high-power laser focused on the target by lens, PLD can vapor the surface of the target to form the plasma plume.The plumed plasma nally deposite on the substrate to form lms.As we know by the prevous papers, growing diamond-like lms with PLD is commom. However, due to the internal stress (about 10 GPa)during the growth of carbon-lm deposition, the diamond-like films grown by far could no exceed 0.1um. As we know, no one has grown the dimond-like films structures with PLD by far. All we saw were amorphous carbon films. We developed the new PLD technology which is apply another pulse laser to heat the films on the substrate in this thesis, we try to achieve two problems we have talked above. It can eliminate the stress relief patterns by using another control beam because the control beam decreases the sp3 ratio of the diamond-like carbon films so that increases the adhesion of the films, so it seems that we can't eliminate the stress relief patterns without not change the sp3 ratio. We obtain the peak representing the crystallinity of carbon films near the diamond peak at 1332 cm^1 by using another control beam,but some of the carbon films are ablated by control beam.