Design of an atomic force microscope utilizing quartz tuning fork as the sensing kernel

碩士 === 國立交通大學 === 機械工程系所 === 101 === This thesis presents a design of an atomic force microscope(AFM)utilizing quartz tuning fork(QTF)as the sensing kernel. QTF can be a force sensor replacing conventional AFM optical detecting system. Conventional atomic force microscopes using optical system dete...

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Bibliographic Details
Main Authors: Li, Mei-Jiao, 李美嬌
Other Authors: Hung, Shao-Kang
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/03371209165302937109
Description
Summary:碩士 === 國立交通大學 === 機械工程系所 === 101 === This thesis presents a design of an atomic force microscope(AFM)utilizing quartz tuning fork(QTF)as the sensing kernel. QTF can be a force sensor replacing conventional AFM optical detecting system. Conventional atomic force microscopes using optical system detect microcantilever deflection. The mechanism of the optical system and the alignment of the laser spot are too complex to scan large sample by AFM systems. The presented QTF based probe can be used as a sensor in tapping-mode AFM systems.