Simulations of Flow Field in a Wafer-Etching Tank

Simulations of Flow Field in a Wafer-Etching Tank

碩士 === 國立交通大學 === 機械工程系所 === 101

Bibliographic Details
Main Authors:	Wu, Kai-Chun, 吳開俊
Other Authors:	Chen, Ching-Yao
Format:	Others
Language:	zh-TW
Published:	2013
Online Access:	http://ndltd.ncl.edu.tw/handle/92492424458468230251

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