Feasibility study of Applying TiC Film on MEMS Inertial Switch
碩士 === 國立交通大學 === 機械工程學系 === 101 === This study, we present an inertial switch which employing titanium carbide (TiC) protective thin film to increase abrasion resistance, and simultaneously, autoxidation. Our objective is to enhance the life cycle of inertial switch. Both 30 nanometer film thicknes...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42117101315630127437 |