A study of monolayer doping technology and its application
碩士 === 國立交通大學 === 電子物理系所 === 101 === Nowadays, scaling device down to nanometer-size encounter many fundamental and technological challenges, one of the major challenges is attaining controlled doping of materials. As three-dimension structure is about to replace planar device, it become more crit...
Main Authors: | Wang, Yi-Hong, 王貽泓 |
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Other Authors: | Chao, Tien-Sheng |
Format: | Others |
Language: | en_US |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/07223214591465032735 |
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